INTRODUCING GEN 2.0 SETS THAT LAST 40% - 160% LONGER!
Conax Gen 2.0 sensors are designed to provide longer service life over the Gen 1.X counterparts.
| Example: Our longer-lasting Gen 2.0 thermocouples have allowed one of our 150/200mm EPI customers to reduce by 50% the number of PMs required solely to change out thermocouples. This gives them the ability to process more wafers, translating to a projected $1+ million increase in finished product revenue per reactor, ,per year. |
Gen 1.X Sets are Available
Our Gen 1.0 sensors are manufactured from custom-sized quartz sheaths as specified by the OEM and offer comparable thermocouple life at less cost. .
Our Gen 1.1 sensors are interchangeable with Gen 1.0, but are manufactured from standard-sized quartz tubing. This standard-sized quartz tubing has a thicker wall than the standard OEM version so it lasts 10% - 30% longer but costs less than Gen 1.0 .
Product Features
- 150mm, 200mm and 300mm sets are available.
- Type R thermocouples include special limits of error.
- Sheaths are manufactured from semiconductor-grade quartz tubing.
- Laser engraved serial numbers are on each connector.
- Each sensor is heat sealed into two bags that are suitable for use with clean room procedures.
- Square-cut insulator segments improve performance by minimizing thermocouple drift caused by vapor phase transport of rhodium to the pure platinum leg of the sensor. Others take shortcuts by removing large portions of the insulator thereby allowing the insulator to break at curved points of the sheath. This causes large areas of the wire surface to be exposed, thereby increasing the potential for cross-contamination and subsequent drift to occur.
Conax Semiconductor Services
- Quartz re-sheathing option is available.
- Platinum reclamation program is available.
- All thermoelements used in the construction of our sensors are calibrated using recognized American Society for Testing and Materials (ASTM) International procedures with temperature standards traceable to National Institute of Standards and Technology (NIST). Individual sensors can be custom calibrated upon request.
- Allow Conax Semiconductor to carry your inventory to guarantee next day delivery on all items.
- Transmitters can convert the thermocouple output into a 4-20mA current loop output.
Customer Designs are Available
Conax Semiconductor will work with your engineering staff to create a special variation of any sensor so that it is uniquely designed to accomplish your specific objective. Some variations we can offer include variations in diffusion treatment of the quartz sheath, multiple junctions contained within a single sheath, special junction locations and other dimensional variations.
- Front - Side - Rear - Bijunction - |
| Susceptor Size |
Susceptor Position |
ASM Reference P/N |
Typical OEM Probe Life |
10% - 30%
Extended Life |
40% - 160%
Extended Life |
|
| Gen 1.0 |
Gen 1.1 |
Gen 2.0 |
| Conax P/N |
Conax P/N |
Conax P/N |
| 150mm |
Front |
02-323647D01 |
10-0710-001 |
10-0794-001 |
10-0969-001 |
| Side |
02-323649D01 |
10-0711-001 |
10-0793-001 |
10-0968-001 |
| Rear |
02-323648D01 |
10-0709-001 |
10-0792-001 |
10-0942-004 |
| Bijunction |
02-327874D01 |
10-0712-001 |
10-0795-001 |
10-1003-001 |
| 200mm |
Front |
02-323652D01 |
10-0074-001 |
10-0746-001 |
10-0967-001 |
| Side |
02-323654D01 |
10-0073-001 |
10-0745-001 |
10-0966-001 |
| Rear |
02-323653D01 |
10-0072-001 |
10-0744-001 |
10-0942-001 |
| Bijunction |
02-327875D01 |
10-0459-001 |
10-0747-001 |
10-1004-001 |
| 300mm |
Front |
N/A |
10-0924-001 |
Contact Conax |
Contact Conax |
| Side |
02-178706D01 |
10-0925-001 |
Contact Conax |
Contact Conax |
| Rear |
02-178705D01 |
10-0923-001 |
Contact Conax |
Contact Conax |
| Bijunction |
02-178704D01 |
10-0926-001 |
Contact Conax |
Contact Conax |
- Center - |
| Susceptor Size |
Susceptor Position |
ASM Reference P/N |
Typical OEM Probe Life |
10% - 30%
Extended Life |
40% - 160%
Extended Life |
|
| Gen 1.0 |
Gen 1.1 |
Gen 2.0 |
| Conax P/N |
Conax P/N |
Conax P/N |
| 150mm |
Center - ATM (ground tip) |
02-321895D01 |
10-0708-001 |
10-0743-004 |
10-0941-004 |
| & |
Center - ATM (non-ground tip) |
02-330816D01 |
Contact Conax |
10-1065-004 |
| 200mm |
Center - RP (ground tip) |
02-323584D01 |
10-0461-001 |
10-0743-001 |
10-0941-001 |
| |
Center - RP (non-ground tip) |
02-330816D02 |
10-0787-001 |
10-1065-001 |
| 300mm |
Center |
02-187139D01 |
10-0922-001 |
Contact Conax |
Contact Conax |
EPSILON® is a registered trademark of ASM International. Neither Conax Technologies or its products are affiliated with, approved by or sponsored by ASM International.
