CONTACT US | SITEMAP | Q&A
Á¦Ç°(PRODUCTS)


   
  [Semiconductor Applications] Triple-Point Calibration Thermocouples for Moore Technologies/Applied Materials Barrel Reactors
  ±Û¾´ÀÌ : ´ÙÀÏIBC     ³¯Â¥ : 11-06-18 17:45     Á¶È¸ : 13966    

Triple-Point Calibration Thermocouples for Moore Technologies/Applied Materials Barrel Reactors

Conax Semiconductor offers a complete selection of both OEM Triple-point calibration thermocouples and special variations that have been customized based on individual fab needs. The Triple-point was designed for use on Applied Materials/Moore Technologies 76XX, 77XX and 78XX Series Epitaxial Barrel Reactors.

The Triple-point sensor allows for the calibration of the 3 infrared (IR) sensors used to monitor susceptor temperature during wafer processing. Because the sensor has 3 measurement junctions, all 3 IR sensors can be calibrated at one time. This saves time and increases repeatability over a single junction sensor because the Triple-point does not have to be repositioned to calibrate each IR sensor.

The three junctions are precisely located. All units are shipped with a two-temperature calibration, typically at 1100C and 1200C or at customer requested temperatures. Triple-point sensors use C-Type thermocouple wire and Inconel sheath material unless designed otherwise by the customer.

Conax also offer an inspection and recalibration service recommended at least annually. The inspection includes an X-ray to determine the condition of the internals of the Triple-point sensor.
   


(ÁÖ)´ÙÀϾÆÀ̺ñ¾¾ | º»»ç : (¿ì)06116 ¼­¿ï °­³²±¸ ºÀÀº»ç·Î25±æ 68, 1Ãþ 103È£ (³íÇöµ¿)  | ¿µ¾÷¼Ò : (¿ì)07021 ¼­¿ï µ¿ÀÛ±¸ ³²ºÎ¼øȯ·Î255°¡±æ 6, 101 (»ç´çµ¿)
»ç¾÷ÀÚ¹øÈ£: 107-87-13393  ´ëÇ¥ ÀÌ¿µ¼®| Tel. 02-2678-0667   Fax : 02-2678-0668   dailibc@dailibc.com  www.dailibc.com
COPYRIGHT ¨Ï DAILIBC ALL RIGHTS RESERVED.