(Piezoresistive Pressure Sensors, ¾ÐÀúÇ×½Ä ¾Ð·Â¼¾¼)
The HM Series is ideal for high-volume, low and medium pressure, harsh-media OEM applications.
Features
Range : 100 to 500 psi (7 to 34.5 bar; 689.5 to 3,447 KPa)
Type : Absolute; pressurized from cavity side
Media : Air, gasses and liquids that are compatible with silicon and glass
Shipping : Wafers on tape
Flexibility : Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance : Enjoy best-in-class performance due to Merit¡¯s proprietary Sentium technology
Cost : Save money over time with high-performing die
Security : Feel confident doing business with an experienced company backed
by a solid parent company (NASDAQ: MMSI)
Speed : Get to market quickly with creative and flexible solutions.
Service : Experience prompt, personal and professional support.
Specifications |
Parameter |
Minimum |
Typical |
Maximum |
Units |
Notes |
Electrical & Environmental |
Excitation |
¡¡ |
5 |
15 |
V |
Maximum: 3mA |
Impedance |
4000 |
5000 |
6000 |
¥Ø |
Optional: 3,500 +/- 500 |
Operating Temperature |
-40 |
¡¡ |
150 |
¡ÆC |
Sentium¢ç technology |
Storage Temperature |
-55 |
¡¡ |
160 |
¡ÆC |
¡¡ |
Performance |
Offset |
-10 |
0 |
10 |
mV/V |
Zero pressure; gage only; @25¡ÆC |
Non-linearity |
-0.2 |
0 |
0.2 |
% FSO |
Best Fit Straight Line; @25¡ÆC |
Pressure Hysteresis |
-0.1 |
0 |
0.1 |
% FSO |
@25¡ÆC |
Temp Coeff - Zero |
-25 |
0 |
25 |
µV/V/¡ÆC |
-40¡ÆC to 150¡ÆC |
Temp Coeff - Resistance |
2300 |
2800 |
3300 |
PPM/¡ÆC |
-40¡ÆC to 150¡ÆC |
Temp Coeff - Sensitivity |
-1500 |
-2200 |
-2500 |
PPM/¡ÆC |
-40¡ÆC to 150¡ÆC |
Long-Term Stability |
-0.2 |
0 |
0.2 |
% FSO |
¡¡ |
Burst Pressure |
5X |
¡¡ |
¡¡ |
¡¡ |
Full scale pressure |
Full-Scale Output (@ 5 volts) Other outputs available upon request |
100 psi (6.9 bar; 689 KPa) |
120 |
150 |
180 |
mV |
¡¡ |
300 psi (20.7 bar 2,068 KPa) |
110 |
135 |
160 |
mV |
¡¡ |
500 psi (34.5 bar 3,447 KPa) |
140 |
175 |
210 |
mV |
¡¡ |
Part Details
Dimensions (millimeters, post-cut)
Standard Bond Pad Metallization = Aluminum
Electrical
Part Number Configurator
Example: T1O-0300-A1T offers 5kohm Impedance, Open Bridge, 100 psi and Absolute Constraint
Standard Part Numbers |
T1O-0300-A1T |
T2O-0300-A1T |
T1O-0090-A1T |
T2O-0090-A1T |
T1O-0070-A1T |
T2O-0070-A1T |
T1H-0300-A1T |
T2H-0300-A1T |
T1H-0090-A1T |
T2H-0090-A1T |
T1H-0070-A1T |
T2H-0070-A1T |
T1C-0300-A1T |
T2C-0300-A1T |
T1C-0090-A1T |
T2C-0090-A1T |
T1C-0070-A1T |
T2C-0070-A1T |
Note: ¡°T¡± in part number = sawn wafer on tape in metal frame
Merit Sensor Systems Çѱ¹´ë¸®Á¡ (ÁÖ)´ÙÀϾÆÀ̺ñ¾¾