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[MEMS Sensing Elements] K Series – High Pressure |
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±Û¾´ÀÌ : ´ÙÀÏIBC
³¯Â¥ : 15-11-08 15:11
Á¶È¸ : 10405
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(Piezoresistive Pressure Sensors / ¾ÐÀúÇ×½Ä ¾Ð·Â¼¾¼)
K Series – High Pressure
The K Series is ideal for high-volume, high-pressure OEM applications.
Overview
Features
Range 1,000 to 15,000 psi (68.9 to 1,034 bar; 6,895 to 103,421 KPa)
Type Absolute
Media Clean, dry air and non-corrosive gases
Shipping Wafers on tape
Flexibility Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance Enjoy best-in-class performance due to Merit¡¯s proprietary Sentium technology
Cost Save money over time with high-performing die
Security Feel confident doing business with an experienced company backed by a solid parent
company (NASDAQ: MMSI)
Speed Get to market quickly with creative and flexible solutions.
Service Experience prompt, personal and professional support.
Applications
Merit Sensor Systems, Inc. has partnered with customers for more than 20 years to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications.
Merit Sensor offers full-service design capabilities, in-house wafer fabrication, flexible shipping, packaging and assembly, piezoresistive technology (PRT), expansive pressure ranges (0.15 psi to 15,000 psi), complete pressure measurement (absolute, gage, differential and vacuum) and unmatched operating temperature range (-40¡ÆC to 150¡ÆC) via our Sentium¢ç process. Additionally, Merit Sensor is able to provide unparalleled flexibility to customize pressure sensing solutions to fit into our customers¡¯ applications.
Unlike other pressure sensor suppliers, Merit Sensor can provide customers with completely customized pressure sensor designs with large or smaller/limited production runs. Our customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and rely on Merit Sensor for highly stable and sensitive MEMS sensing elements (bare die), to customers who have little to no experience in the pressure sensing world and look to Merit Sensor to assist with a completely custom design and implementation of a pressure sensor that best fits their application.
At Merit Sensor our engineers are application experts. We are ready to help customers design your application to work with a pressure sensor, and/or design a customized pressure sensing solution that works for your application. If you are unsure whether a pressure sensor is right for your application, Merit Sensor can help you make that determination.
Specifications (Preliminary)
|
Minimum |
Typical |
Maximum |
Units |
Notes |
Electrical & Environmental |
Excitation |
¡¡ |
5 |
15 |
V |
Maximum: 3mA |
Impedance |
4000 |
5000 |
6000 |
¥Ø |
Optional: 3,500 +/- 500 |
Operating Temperature |
-40 |
¡¡ |
150 |
¡ÆC |
Sentium¢ç technology |
Storage Temperature |
-55 |
¡¡ |
160 |
¡ÆC |
¡¡ |
Performance |
Offset |
-10 |
0 |
10 |
mV/V |
Zero pressure; gage only; @@25¡ÆC |
Non-linearity |
-0.15 |
0 |
0.15 |
% FSO |
Best Fit Straight Line; @@25¡ÆC |
Pressure Hysteresis |
-0.05 |
0 |
0.05 |
% FSO |
@@25¡ÆC |
Temp Coeff – Zero |
-25 |
0 |
25 |
µV/V/¡ÆC |
-40¡ÆC to 150¡ÆC |
Temp Coeff – Resistance |
2300 |
2800 |
3300 |
PPM/¡ÆC |
-40¡ÆC to 150¡ÆC |
Temp Coeff – Sensitivity |
-1500 |
-2200 |
-2500 |
PPM/¡ÆC |
-40¡ÆC to 150¡ÆC |
Thermal Hysteresis |
-0.1 |
0 |
0.1 |
% FSO |
Zero pressure |
Long-Term Stability |
-0.1 |
0 |
0.1 |
% FSO |
¡¡ |
Burst Pressure |
3X |
¡¡ |
¡¡ |
¡¡ |
Full scale pressure |
Full-Scale Output (@@ 5 volts) Other outputs available upon request |
1,000 psi (68.9 bar; 6,895 KPa) |
125 |
150 |
175 |
mV |
¡¡ |
5,000 psi (345 bar 32,474 KPa) |
125 |
150 |
175 |
mV |
¡¡ |
10,000 psi (689 bar 68,948 KPa) |
125 |
150 |
175 |
mV |
¡¡ |
15,000 psi (1034 bar 103,4218 KPa) |
125 |
150 |
175 |
mV |
¡¡
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Part Details
Dimensions (millimeters, post-cut)
Electrical
Part Number Configurator
Example: K1O-0003-5T offers 5kohm Impedance, Open Bridge, 10,000 psi and Absolute Constraint
Standard Part Numbers
Note: ¡°T¡± in part number = sawn wafer on tape in metal frame
Merit Sensor Systems Çѱ¹ ÃÑÆÇ (ÁÖ)´ÙÀϾÆÀ̺ñ¾¾
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