(Piezoresistive Pressure Sensors, 압저항식 압력센서)
The HM Series is ideal for high-volume, low and medium pressure, harsh-media OEM applications.
Features
Range : 100 to 500 psi (7 to 34.5 bar; 689.5 to 3,447 KPa)
Type : Absolute; pressurized from cavity side
Media : Air, gasses and liquids that are compatible with silicon and glass
Shipping : Wafers on tape
Flexibility : Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Cost : Save money over time with high-performing die
Security : Feel confident doing business with an experienced company backed
by a solid parent company (NASDAQ: MMSI)
Speed : Get to market quickly with creative and flexible solutions.
Service : Experience prompt, personal and professional support.
| Specifications |
| Parameter |
Minimum |
Typical |
Maximum |
Units |
Notes |
| Electrical & Environmental |
| Excitation |
|
5 |
15 |
V |
Maximum: 3mA |
| Impedance |
4000 |
5000 |
6000 |
Ω |
Optional: 3,500 +/- 500 |
| Operating Temperature |
-40 |
|
150 |
°C |
Sentium® technology |
| Storage Temperature |
-55 |
|
160 |
°C |
|
| Performance |
| Offset |
-10 |
0 |
10 |
mV/V |
Zero pressure; gage only; @25°C |
| Non-linearity |
-0.2 |
0 |
0.2 |
% FSO |
Best Fit Straight Line; @25°C |
| Pressure Hysteresis |
-0.1 |
0 |
0.1 |
% FSO |
@25°C |
| Temp Coeff - Zero |
-25 |
0 |
25 |
µV/V/°C |
-40°C to 150°C |
| Temp Coeff - Resistance |
2300 |
2800 |
3300 |
PPM/°C |
-40°C to 150°C |
| Temp Coeff - Sensitivity |
-1500 |
-2200 |
-2500 |
PPM/°C |
-40°C to 150°C |
| Long-Term Stability |
-0.2 |
0 |
0.2 |
% FSO |
|
| Burst Pressure |
5X |
|
|
|
Full scale pressure |
| Full-Scale Output (@ 5 volts) Other outputs available upon request |
| 100 psi (6.9 bar; 689 KPa) |
120 |
150 |
180 |
mV |
|
| 300 psi (20.7 bar 2,068 KPa) |
110 |
135 |
160 |
mV |
|
| 500 psi (34.5 bar 3,447 KPa) |
140 |
175 |
210 |
mV |
|
Part Details
Dimensions (millimeters, post-cut)
Standard Bond Pad Metallization = Aluminum
Electrical
Part Number Configurator
Example: T1O-0300-A1T offers 5kohm Impedance, Open Bridge, 100 psi and Absolute Constraint
| Standard Part Numbers |
| T1O-0300-A1T |
T2O-0300-A1T |
| T1O-0090-A1T |
T2O-0090-A1T |
| T1O-0070-A1T |
T2O-0070-A1T |
| T1H-0300-A1T |
T2H-0300-A1T |
| T1H-0090-A1T |
T2H-0090-A1T |
| T1H-0070-A1T |
T2H-0070-A1T |
| T1C-0300-A1T |
T2C-0300-A1T |
| T1C-0090-A1T |
T2C-0090-A1T |
| T1C-0070-A1T |
T2C-0070-A1T |
Note: “T” in part number = sawn wafer on tape in metal frame
Merit Sensor Systems 한국대리점 (주)다일아이비씨
