(Piezoresistive Pressure Sensors / ¾ÐÀúÇ×½Ä ¾Ð·Â¼¾¼)
New Fully Compensated TR Series
Overview
Features
Range 15 to 500 psi (1.03 to 34.47 bar; 103.4 to 3,447.4 kPa)
Type Absolute, gage
Media Air, gases and liquids
Packaging Bulk, Tape & Reel
Flexibility Sensitivity, resistance, bridge, constraint, etc.
Temperature Range -40 to +150 C
Benefits
Performance Enjoy best-in-class performance due to Merit¡¯s proprietary Sentium technology
Cost Save money over time with high-performing die
Security Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI)
Speed Get to market quickly with creative and flexible solutions.
Service Experience prompt, personal and professional support.
Typical Applications
Industrial HVAC
Industrial Automation
Refrigeration
Automotive Transmission Pressure
Oil Pressure
Fuel Rail
EGR/Exhaust
Applications
Merit Sensor Systems, Inc. has partnered with customers for more than 20 years to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications.
Merit Sensor offers full-service design capabilities, in-house wafer fabrication, flexible shipping, packaging and assembly, piezoresistive technology (PRT), expansive pressure ranges (0.15 psi to 15,000 psi), complete pressure measurement (absolute, gage, differential and vacuum) and unmatched operating temperature range (-40¡ÆC to 150¡ÆC) via our Sentium¢ç process. Additionally, Merit Sensor is able to provide unparalleled flexibility to customize pressure sensing solutions to fit into our customers¡¯ applications.
Unlike other pressure sensor suppliers, Merit Sensor can provide customers with completely customized pressure sensor designs with large or smaller/limited production runs. Our customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and rely on Merit Sensor for highly stable and sensitive MEMS sensing elements (bare die), to customers who have little to no experience in the pressure sensing world and look to Merit Sensor to assist with a completely custom design and implementation of a pressure sensor that best fits their application.
At Merit Sensor our engineers are application experts. We are ready to help customers design your application to work with a pressure sensor, and/or design a customized pressure sensing solution that works for your application. If you are unsure whether a pressure sensor is right for your application, Merit Sensor can help you make that determination.
Specifications
|
Symbol |
Min. |
Typ. |
Max. |
Unit |
Electrical |
Supply Voltage |
Vdd |
4.5 |
5 |
5.5 |
Volts |
Supply Current |
Id |
¡¡ |
¡¡ |
10 |
mA |
Output Current |
Iout |
¡¡ |
¡¡ |
2.5 |
mA |
Short Circuit Current |
Isc |
-25 |
¡¡ |
25 |
mA |
Reverse Polarity Protection1 |
Vrp |
-33 |
¡¡ |
¡¡ |
Volts |
Overvoltage Protection1 |
Vop |
¡¡ |
¡¡ |
33 |
Volts |
ESD2 |
Vesd |
>4 |
¡¡ |
¡¡ |
kV |
Performance |
Output Range |
Vout |
10 |
¡¡ |
90 |
%Vdd |
Resolution |
Pres |
0.1 |
0.03 |
0.02 |
%FS |
Pressure Error3 |
Perr |
-2.5 |
0 |
2.5 |
% FS |
Static Proof Pressure |
Pproof |
¡¡ |
2X FS |
¡¡ |
PSIA |
Burst Pressure |
Pburst |
¡¡ |
3X FS |
¡¡ |
PSIA |
Failed Low |
¡¡ |
¡¡ |
< 9 |
¡¡ |
%Vdd |
Failed High |
¡¡ |
¡¡ |
> 91 |
¡¡ |
%Vdd |
Lifetime Drift |
Plife |
¡¡ |
¡¡ |
0.5 |
%FS |
Repeatability |
Prepeat |
¡¡ |
¡¡ |
0.25 |
%FS |
Environmental |
Operating Temperature |
¡¡ |
-40 |
¡¡ |
150 |
¡ÆC |
Storage Temperature |
¡¡ |
-55 |
¡¡ |
150 |
¡ÆC
|
1 Device will cease operation during supply voltage fault.
2 Human body model1.5kOhm/100pF.
3 Pressure Error includes all error for hysteresis and linearity over the entire operating temperature range. It does not include lifetime drift
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