(Piezoresistive Pressure Sensors, 압저항식 압력센서)
The 5000 Series High Pressure is ideal for
high-volume, high-pressure OEM applications.
| Overview |
| Features |
| Range : 1,000 to 10,000 psi (69 to 689 bar; 6,895 to 68,948 KPa) |
| Type : Absolute |
| Media : Clean, dry air and non-corrosive gasses |
| Shipping : Wafers on tape |
| Flexibility : Sensitivity, resistance, bridge, constraint, etc. |
|
| Benefits |
| Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology |
| Cost : Save money over time with high-performing die |
| Security : Feel confident doing business with an experienced company backed |
| by a solid parent company (NASDAQ: MMSI) |
| Speed : Get to market quickly with creative and flexible solutions. |
| Service : Experience prompt, personal and professional support. |
| Specifications |
| Parameter |
Minimum |
Typical |
Maximum |
Units |
Notes |
| Electrical & Environmental |
| Excitation |
|
5 |
15 |
V |
Maximum: 3mA |
| Impedance |
4000 |
5000 |
6000 |
Ω |
Optional: 3,500 +/- 500 |
| Operating Temperature |
-40 |
|
150 |
°C |
Sentium® technology |
| Storage Temperature |
-55 |
|
160 |
°C |
|
| Performance |
| Offset |
-10 |
0 |
10 |
mV/V |
Zero pressure; @25°C |
| Non-linearity |
-0.15 |
0 |
0.15 |
% FSO |
BFSL; @25°C |
| Non-linearity (>5000) |
-0.35 |
0 |
0.35 |
% FSO |
BFSL; @25°C |
| Pressure Hysteresis |
-0.05 |
0 |
0.05 |
% FSO |
@25°C |
| Temp Coeff - Zero |
-25 |
0 |
25 |
µV/V/°C |
-40°C to 150°C |
| Temp Coeff - Resistance |
2300 |
2800 |
3300 |
PPM/°C |
-40°C to 150°C |
| Temp Coeff - Sensitivity |
-1500 |
-2200 |
-2500 |
PPM/°C |
-40°C to 150°C |
| Thermal Hysteresis |
-0.1 |
0 |
0.1 |
% FSO |
Zero pressure |
| Long-Term Stability |
-0.1 |
0 |
0.1 |
% FSO |
|
| Burst Pressure |
3X |
|
|
|
Full scale pressure |
| Full-Scale Output (@ 5 volts) Other outputs available upon request |
| 1,000 psi (68.9 bar; 6,895 KPa) |
105 |
125 |
145 |
mV |
|
| 3,000 psi (207 bar; 20,684 KPa) |
150 |
180 |
210 |
mV |
|
| 5,000 psi (345 bar 34,474 KPa) |
165 |
200 |
235 |
mV |
|
| 10,000 psi (689 bar 68,948 KPa) |
250 |
300 |
350 |
mV |
|
Dimensions (millimeters, post-cut)
Standard Bond Pad Metallization = Aluminum
Other contraints available
Electrical
Part Number Configurator
Example: 5SO-0025-5T offers 5kohm Impedance, Open Bridge, 1000 psi and Absolute Constraint
| Standard Part Numbers |
| 5SO-0025-5T |
6SO-0025-5T |
| 5SO-0012-5T |
6SO-0012-5T |
| 5SO-0008-5T |
6SO-0008-5T |
| 5SO-0006-5T |
6SO-0006-5T |
| 5SH-0025-5T |
6SH-0025-5T |
| 5SH-0012-5T |
6SH-0012-5T |
| 5SH-0008-5T |
6SH-0008-5T |
| 5SH-0006-5T |
6SH-0006-5T |
| 5SC-0025-5T |
6SC-0025-5T |
| 5SC-0012-5T |
6SC-0012-5T |
| 5SC-0008-5T |
6SC-0008-5T |
| 5SC-0006-5T |
6SC-0006-5T |
Note: “T” in part number = sawn wafer on tape in metal frame
Merit Sensor Systems 한국대리점 (주)다일아이비씨
