(Piezoresistive Pressure Sensors, 압저항식 압력센서)
The 3000 Series Low Pressure is ideal for
high-volume, low-pressure OEM applications.
Overview
| Features |
| Range : 5 to 100 psi (.34 to 6.9 bar; 34.5 to 689 KPa) |
| Type : Absolute, gage, differential and vacuum |
| Media : Clean, dry air and non-corrosive gasses |
| Shipping : Wafers on tape |
| Flexibility : Sensitivity, resistance, bridge, constraint, etc. |
|
| Benefits |
| Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology |
| Cost : Save money over time with high-performing die |
| Security : Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI) |
| Speed : Get to market quickly with creative and flexible solutions. |
| Service : Experience prompt, personal and professional support. |
Specifications
| Parameter |
Minimum |
Typical |
Maximum |
Units |
Notes |
| Electrical & Environmental |
| Excitation |
|
5 |
15 |
V |
Maximum: 3mA |
| Impedance |
4000 |
5000 |
6000 |
Ω |
Optional: 3,500 +/- 500 |
| Operating Temperature |
-40 |
|
150 |
°C |
Sentium® technology |
| Storage Temperature |
-55 |
|
160 |
°C |
|
| Performance |
| Offset |
-10 |
0 |
10 |
mV/V |
Zero pressure; gage only; @25°C |
| Non-linearity |
-0.2 |
0 |
0.2 |
% FSO |
Best Fit Straight Line; @25°C |
| Pressure Hysteresis |
-0.1 |
0 |
0.1 |
% FSO |
@25°C |
| Temp Coeff - Zero |
-25 |
0 |
25 |
µV/V/°C |
-40°C to 150°C |
| Temp Coeff - Resistance |
2300 |
2800 |
3300 |
PPM/°C |
-40°C to 150°C |
| Temp Coeff - Sensitivity |
-1500 |
-2200 |
-2500 |
PPM/°C |
-40°C to 150°C |
| Thermal Hysteresis |
-0.2 |
0 |
0.2 |
% FSO |
Zero pressure |
| Long-Term Stability |
-0.2 |
0 |
0.2 |
% FSO |
|
| Burst Pressure |
3X |
|
|
|
Full scale pressure |
| Full-Scale Output (@ 5 volts) Other outputs available upon request |
| 5 psi (.34 bar; 34.5 KPa) |
60 |
75 |
90 |
mV |
|
| 15 psi (1 bar; 103 KPa) |
125 |
150 |
175 |
mV |
|
| 30 psi (2.1 bar 207 KPa) |
120 |
150 |
180 |
mV |
|
| 50 psi (3.4 bar 345 KPa) |
100 |
125 |
150 |
mV |
|
| 100 psi (6.9 bar; 689 KPa) |
125 |
150 |
175 |
mV |
|
Dimensions (millimeters, post-cut)
Standard Bond Pad Metallization = Aluminum
Absolute also; other contraints available
Electrical
Part Number Configurator
Example: 3SO-3000-CT offers 5kohm Impedance, Open Bridge, 5 psi and Gage Constraint
Standard Part Numbers
| 3SO-3000-6T |
3SC-3000-6T |
4SH-3000-6T |
| 3SO-2000-6T |
3SC-2000-6T |
4SH-2000-6T |
| 3SO-1000-6T |
3SC-1000-6T |
4SH-1000-6T |
| 3SO-0500-6T |
3SC-0500-6T |
4SH-0500-6T |
| 3SO-0300-6T |
3SC-0300-6T |
4SH-0300-6T |
| 3SO-3000-CT |
3SC-3000-CT |
4SH-3000-CT |
| 3SO-2000-CT |
3SC-2000-CT |
4SH-2000-CT |
| 3SO-1000-CT |
3SC-1000-CT |
4SH-1000-CT |
| 3SO-0500-CT |
3SC-0500-CT |
4SH-0500-CT |
| 3S0-0300-CT |
3SC-0300-CT |
4SH-0300-CT |
| 3SH-3000-6T |
4SO-3000-6T |
4SC-3000-6T |
| 3SH-2000-6T |
4SO-2000-6T |
4SC-2000-6T |
| 3SH-1000-6T |
4SO-1000-6T |
4SC-1000-6T |
| 3SH-0500-6T |
4SO-0500-6T |
4SC-0500-6T |
| 3SH-0300-6T |
4SO-0300-6T |
4SC-0300-6T |
| 3SH-3000-CT |
4SO-3000-CT |
4SC-3000-CT |
| 3SH-2000-CT |
4SO-2000-CT |
4SC-2000-CT |
| 3SH-1000-CT |
4SO-1000-CT |
4SC-1000-CT |
| 3SH-0500-CT |
4SO-0500-CT |
4SC-0500-CT |
| 3SH-0300-CT |
4S0-0300-CT |
4SC-0300-CT |
Note: “T” in part number = sawn wafer on tape in metal frame
Merit Sensor Systems 한국대리점 (주)다일아이비씨
