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  [MEMS Sensing Elements] 3000 Series Low Pressure
  글쓴이 : 다일IBC     날짜 : 11-11-05 19:47     조회 : 4998    
(Piezoresistive Pressure Sensors, 압저항식 압력센서)
 
 
 

The 3000 Series Low Pressure is ideal for
high-volume, low-pressure OEM applications.

Overview

Features
Range    : 5 to 100 psi (.34 to 6.9 bar; 34.5 to 689 KPa)
Type      : Absolute, gage, differential and vacuum
Media     : Clean, dry air and non-corrosive gasses
Shipping : Wafers on tape
Flexibility : Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Cost            : Save money over time with high-performing die
Security       : Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI)
Speed         : Get to market quickly with creative and flexible solutions.
Service       : Experience prompt, personal and professional support.
 

Specifications

Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental 
Excitation   5 15 V Maximum: 3mA
Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500
Operating Temperature -40   150 °C Sentium® technology
Storage Temperature -55   160 °C  
Performance 
Offset -10 0 10 mV/V Zero pressure; gage only; @25°C
Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line; @25°C
Pressure Hysteresis -0.1 0 0.1 % FSO @25°C
Temp Coeff - Zero -25 0 25 µV/V/°C -40°C to 150°C
Temp Coeff - Resistance 2300 2800 3300 PPM/°C -40°C to 150°C
Temp Coeff - Sensitivity -1500 -2200 -2500 PPM/°C -40°C to 150°C
Thermal Hysteresis -0.2 0 0.2 % FSO Zero pressure
Long-Term Stability -0.2 0 0.2 % FSO  
Burst Pressure 3X       Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request 
5 psi (.34 bar; 34.5 KPa) 60 75 90 mV  
15 psi (1 bar; 103 KPa) 125 150 175 mV  
30 psi (2.1 bar 207 KPa) 120 150 180 mV  
50 psi (3.4 bar 345 KPa) 100 125 150 mV  
100 psi (6.9 bar; 689 KPa) 125 150 175 mV  
 
Dimensions (millimeters, post-cut)
 
 
 
Standard Bond Pad Metallization = Aluminum
 
Absolute also; other contraints available

Electrical

Part Number Configurator

Example: 3SO-3000-CT offers 5kohm Impedance, Open Bridge, 5 psi and Gage Constraint

Standard Part Numbers
 
3SO-3000-6T 3SC-3000-6T 4SH-3000-6T
3SO-2000-6T 3SC-2000-6T 4SH-2000-6T
3SO-1000-6T 3SC-1000-6T 4SH-1000-6T
3SO-0500-6T 3SC-0500-6T 4SH-0500-6T
3SO-0300-6T 3SC-0300-6T 4SH-0300-6T
3SO-3000-CT 3SC-3000-CT 4SH-3000-CT
3SO-2000-CT 3SC-2000-CT 4SH-2000-CT
3SO-1000-CT 3SC-1000-CT 4SH-1000-CT
3SO-0500-CT 3SC-0500-CT 4SH-0500-CT
3S0-0300-CT 3SC-0300-CT 4SH-0300-CT
3SH-3000-6T 4SO-3000-6T 4SC-3000-6T
3SH-2000-6T 4SO-2000-6T 4SC-2000-6T
3SH-1000-6T 4SO-1000-6T 4SC-1000-6T
3SH-0500-6T 4SO-0500-6T 4SC-0500-6T
3SH-0300-6T 4SO-0300-6T 4SC-0300-6T
3SH-3000-CT 4SO-3000-CT 4SC-3000-CT
3SH-2000-CT 4SO-2000-CT 4SC-2000-CT
3SH-1000-CT 4SO-1000-CT 4SC-1000-CT
3SH-0500-CT 4SO-0500-CT 4SC-0500-CT
3SH-0300-CT 4S0-0300-CT 4SC-0300-CT

  Note: “T” in part number = sawn wafer on tape in metal frame
  
 
 
 
Merit Sensor Systems 한국대리점 (주)다일아이비씨 
 
 
   


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