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  [MEMS Sensing Elements] HM Series Harsh Media, Absolute
  글쓴이 : 다일IBC     날짜 : 11-11-09 01:34     조회 : 5135    
(Piezoresistive Pressure Sensors, 압저항식 압력센서)
 
 
 

The HM Series is ideal for high-volume, low and medium pressure, harsh-media OEM applications.

Overview

Features

Range       : 100 to 500 psi (7 to 34.5 bar; 689.5 to 3,447 KPa)

Type        :   Absolute; pressurized from cavity side

Media       :   Air, gasses and liquids that are compatible with silicon and glass

Shipping    :   Wafers on tape

Flexibility   :  Sensitivity, resistance, bridge, constraint, etc.

 

Benefits

Performance   :  Enjoy best-in-class performance due to Merit’s proprietary Sentium technology

Cost           :  Save money over time with high-performing die

Security       :   Feel confident doing business with an experienced company backed

by a solid parent company (NASDAQ: MMSI)

Speed         :   Get to market quickly with creative and flexible solutions.

Service        :   Experience prompt, personal and professional support.

 

Specifications
Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation   5 15 V Maximum: 3mA
Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500
Operating Temperature -40   150 °C Sentium® technology
Storage Temperature -55   160 °C  
Performance
Offset -10 0 10 mV/V Zero pressure; gage only; @25°C
Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line; @25°C
Pressure Hysteresis -0.1 0 0.1 % FSO @25°C
Temp Coeff - Zero -25 0 25 µV/V/°C -40°C to 150°C
Temp Coeff - Resistance 2300 2800 3300 PPM/°C -40°C to 150°C
Temp Coeff - Sensitivity -1500 -2200 -2500 PPM/°C -40°C to 150°C
Long-Term Stability -0.2 0 0.2 % FSO  
Burst Pressure 5X       Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
100 psi (6.9 bar; 689 KPa) 120 150 180 mV  
300 psi (20.7 bar 2,068 KPa) 110 135 160 mV  
500 psi (34.5 bar 3,447 KPa) 140 175 210 mV  

Part Details

Dimensions (millimeters, post-cut)

Standard Bond Pad Metallization = Aluminum

Electrical

Part Number Configurator

Example: T1O-0300-A1T offers 5kohm Impedance, Open Bridge, 100 psi and Absolute Constraint
Standard Part Numbers
T1O-0300-A1T T2O-0300-A1T
T1O-0090-A1T T2O-0090-A1T
T1O-0070-A1T T2O-0070-A1T
T1H-0300-A1T T2H-0300-A1T
T1H-0090-A1T T2H-0090-A1T
T1H-0070-A1T T2H-0070-A1T
T1C-0300-A1T T2C-0300-A1T
T1C-0090-A1T T2C-0090-A1T
T1C-0070-A1T T2C-0070-A1T
Note: “T” in part number = sawn wafer on tape in metal frame
 
Merit Sensor Systems 한국대리점 (주)다일아이비씨 

   


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